Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 14, 2010
Patent Application Number
12318036
Date Filed
December 19, 2008
Patent Primary Examiner
Patent abstract
A map of the surface of a substrate is generated at a measurement station. The substrate is then moved to where a space between a projection lens and the substrate is filled with a liquid. The substrate is then aligned using, for example, a transmission image sensor and, using the previous mapping, the substrate can be accurately exposed. Thus the mapping does not take place in a liquid environment.
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