Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 21, 2010
Patent Application Number
12392794
Date Filed
February 25, 2009
Patent Primary Examiner
Patent abstract
A file is formed by coating a substrate with a film-forming composition including a compound having an alicyclic hydrocarbon structure and irradiating the coated composition with microwaves having a frequency of 5.8 GHz. An insulating film is formed by irradiating a film including a compound having a siloxane structure with microwave having a frequency of 5.8 GHz. These films possess excellent film properties such as dielectric constant and mechanical strength.
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