US Patent 7800083 Plasma electron flood for ion beam implanter
Patent 7800083 was granted and assigned to Axcelis Technologies on September, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 6, 2007
0
Date of Patent
September 21, 2010
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Patent Application Number
11935738
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Patent Inventor Names
William F. DiVergilio
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Bo H. Vanderberg
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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