Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jeffrey C Andle0
John H. Bradshaw0
Reichl B Haskell0
Date of Patent
September 21, 2010
0Patent Application Number
118141670
Date Filed
April 20, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A coating providing high abrasion and chemical resistance composed of a barrier layer from vanadium, molybdenum, niobium, tantalum and the like, and an outer layer of diamond-like carbon. The coating is especially applicable for acoustic wave device (AWD) based sensors, and for passivating an electrode such as an electrode deposited on the AWD sensing area. The coating provides excellent mechanical and acoustical characteristics for coating acoustic wave devices allowing the sensor to operate in harsh environments.
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