US Patent 7800312 Dual mode ion source for ion implantation
Patent 7800312 was granted and assigned to SemEquip on September, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 26, 2006
0
Date of Patent
September 21, 2010
0
Patent Application Number
11527994
0
Patent Inventor Names
Thomas Neil Horsky
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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