Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoshi Sakaguchi0
Date of Patent
September 21, 2010
0Patent Application Number
122920100
Date Filed
November 10, 2008
0Patent Primary Examiner
Patent abstract
An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.
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