Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Douglas S Goodman0
Philip Robert LeBlanc0
Date of Patent
September 21, 2010
0Patent Application Number
118090910
Date Filed
May 31, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for inspecting a transparent substrate provides an index-matching fluid between an index-matched optical coupler and a surface of the transparent substrate. The method repeats, at two or more positions along the surface of the transparent substrate, steps of illuminating an inspection volume within the transparent substrate by directing a ribbon of light through the optical coupler and into the transparent substrate and detecting scattered light from the inspection volume at a detector that is optically conjugate with the inspection volume.
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