Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Benyamin Buller0
Gilad Almogy0
Date of Patent
September 21, 2010
0Patent Application Number
116698090
Date Filed
January 31, 2007
0Patent Primary Examiner
Patent abstract
Images of areas of a wafer are generated and registered with respect to computer aided design (CAD) data to provide a registered images. Defects in the wafer are then detected by comparing the registered images to one another and defect location information is generated in CAD coordinates.
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