Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joseph G. Ameen0
David B. James0
Date of Patent
October 5, 2010
0Patent Application Number
125586470
Date Filed
September 14, 2009
0Patent Primary Examiner
Patent abstract
The present invention provides a method of electrochemical polishing of a workpiece using a polishing pad having a cellular polymeric layer overlying a conductive substrate, the cellular polymeric layer having a thickness less than 1.5 mm; wherein the cellular polymeric layer comprises a plurality of pores that extend through the thickness of the cellular polymeric layer from a polishing surface of the cellular polymeric layer to the conductive substrate; and wherein the plurality of pores exhibit a diameter that is smaller at the polishing surface than at the conductive substrate.
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