Patent 7807613 was granted and assigned to AIR PRODUCTS AND CHEMICALS, INC. on October, 2010 by the United States Patent and Trademark Office.
The invention relates to aqueous, buffered, fluoride containing compositions having a pH of greater than 7.0 to about 11.0. In certain embodiments, the buffered compositions have an extended worklife because pH dependent attributes such as oxide and metal etch rates are stable so long as the pH remains stable.