US Patent 7808638 Scatterometry target and method
Patent 7808638 was granted and assigned to KLA-Tencor on October, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 15, 2008
0
Date of Patent
October 5, 2010
0
Patent Application Number
12121428
0
Patent Inventor Names
Christopher F. Bevis
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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