US Patent 7811085 Gas preheater for chemical vapor processing furnace

A gas preheater (10) that includes an exit plate (20) having first and second sides (22, 24) and a plurality of through holes (26) and at least one body (34) mounted adjacent the first side (22), the at least one body (34) having a first end (36) and a second end (38), the second end (38) located between the body first end (36) and the exit plate first side (22), at least one sidewall (40) connecting the first and second ends (36, 38), a body opening (42) in the first end (36) extending into the body (34) and defining a body inner wall (44), and a plurality of passages (46) extending between the at least one sidewall (40) and the body inner wall (44).