Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 12, 2010
Patent Application Number
12246864
Date Filed
October 7, 2008
Patent Primary Examiner
Patent abstract
A semiconductor memory device includes a first select transistor, first stepped portion, and a first contact plug. The first select transistor is formed on a side of an upper surface of a substrate and has a first multi-layer gate. The first stepped portion is formed by etching the substrate adjacent to the first multi-layer gate of the first select transistor such that the first stepped portion forms a cavity in the upper surface of the substrate. The first contact plug is formed in the first stepped portion.
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