Patent 7814651 was granted and assigned to Fujikura on October, 2010 by the United States Patent and Trademark Office.
A blind hole (3) is formed on a substrate (1) from a first side of the substrate toward a second side of the substrate (1). A conductor (11) is filled in the blind hole (3). The substrate (1) is removed from the opposite side to expose the conductor (13) filled in the blind hole (3).