Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sidlgata V. Sreenivasan0
Byung-Jin Choi0
Shrawan Singhal0
Date of Patent
October 19, 2010
0Patent Application Number
123926630
Date Filed
February 25, 2009
0Patent Primary Examiner
Patent abstract
Defects and/or particles during an imprint lithography process may provide exclusion zones and/or transition zones in the patterned layer. Exclusion zones and/or transition zones in the patterned layer may be identified to provide a region of interest on a template.
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