Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nassim Khonsari0
Bangalore Natarajan0
Fritz Y. F. Su0
Manish Kothari0
Date of Patent
October 19, 2010
0Patent Application Number
115661720
Date Filed
December 1, 2006
0Patent Primary Examiner
Patent abstract
Methods for forming a MEMS display device are provided. In one embodiment, a transparent substrate comprising an array of MEMS devices (e.g., interferometric modulators) formed thereon is annealed following removal of a sacrificial silicon layer. The array is subsequently encapsulated with a backplate comprising a desiccant. MEMS devices disposed below the desiccant have an offset voltage substantially equal to zero.
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