Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joo-han Chang0
Dong-hun Kang0
Wan-jun Park0
Young-kwan Cha0
Date of Patent
October 19, 2010
Patent Application Number
12289192
Date Filed
October 22, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
A nano-elastic memory device and a method of manufacturing the same. The nano-elastic memory device may include a substrate, a plurality of lower electrodes arranged in parallel on the substrate, a support unit formed of an insulating material to a desired or predetermined thickness on the substrate having cavities that expose the lower electrodes, a nano-elastic body extending perpendicular from a surface of the lower electrodes in the cavities, and a plurality of upper electrodes formed on the support unit and perpendicularly crossing the lower electrodes over the nano-elastic bodies.
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