Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jusuke Ogura0
Date of Patent
October 19, 2010
0Patent Application Number
123185800
Date Filed
December 31, 2008
0Patent Primary Examiner
Patent abstract
The semiconductor device comprises a silicon substrate 14 having a step formed in the surface which makes the surface in a flash memory cell region 10 lower than the surface in a peripheral circuit region 12; a device isolation region 20a formed in a trench 18 in the flash memory cell region 10; a device isolation region 20c formed in a trench 24 deeper than the trench 18 in the peripheral circuit region 12; a flash memory cell 46 including a floating gate 32 and a control gate 40 formed on the device region defined by the device isolation region 20a; and transistors 62, 66 formed on the device regions defined by the device isolation region 20c.
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