US Patent 7819981 Methods for cleaning ion implanter components
Is a
Date Filed
October 26, 2004
0
Date of Patent
October 26, 2010
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Patent Application Number
10973673
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Patent Citations Received
Patent Inventor Names
Frank DiMeo, Jr.
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Robert Kaim
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Steven E. Bishop
0
W. Karl Olander
0
James Dietz
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Jeffrey W. Neuner
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Jose I. Arno
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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