Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
October 26, 2010
Patent Application Number
11262826
Date Filed
November 1, 2005
Patent Primary Examiner
Patent abstract
An apparatus is provided which reduces the dependency of the direction of polarization on channels of an image sensor so as to improve the sensitivity of inspection. In the apparatus, the direction of an illumination beam incident on a polarizing beam splitter is made to be substantially parallel to the longitudinal direction of a field of view of an image sensor projected on the polarizing beam splitter.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
