US Patent 7822324 Load lock chamber with heater in tube
Patent 7822324 was granted and assigned to Applied Materials on October, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 24, 2007
0
Date of Patent
October 26, 2010
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Patent Application Number
11782290
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Patent Inventor Names
Suhail Anwar
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Jae-Chull Lee
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Shinichi Kurita
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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