Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Min-Chun Tsai0
Charles C. Chiang0
Date of Patent
October 26, 2010
Patent Application Number
11756596
Date Filed
May 31, 2007
Patent Primary Examiner
Patent abstract
A fast method to detect hot spots using foundry independent models that do not require RET/OPC synthesis is presented. In some embodiments of the present invention, sensitive spots are located. Lithography models are used to simulate the geometry near the sensitive spots to produce a model of the area around the sensitive spots. The sensitive spots are scored using a measure such as intensity (of light) or scoring based on contrast.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
