Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 2, 2010
Patent Application Number
11511117
Date Filed
August 26, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
A preferred embodiment of the MEMS cooling device of the invention comprises one or more MEMS micro-channel volumes in communication with one or more MEMS micro-pump assemblies wherein each micro-pump assembly comprises a flexure valve, such as a leaf valve and means to drive a coolant through the channel volumes such as an electrostatic interleaved comb drive structure. A preferred embodiment comprises an inlet micro-pump assembly and an outlet micro-pump assembly but the device may also be fabricated with a single pump mechanism per channel volume.
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