US Patent 7823488 Device for producing microstructures

The invention discloses a device and a method for producing microstructures with a spindle, which is adapted to be driven for rotation about its longitudinal axis and which is provided with a fixture for clamping a workpiece, having an actuator provided with a fast drive, in particular a piezo drive, adapted to produce fast movement of a tool in a direction substantially perpendicular to the workpiece surface, which actuator can be positioned along a workpiece surface to be worked with the aid of an additional drive adapted to produce a linear feed motion in a first direction, the fast drive being coupled with the tool via guide means that allow feeding of the tool in axial direction of the fast drive, against the action of a restoring force, and that is highly rigid in a plane perpendicular to that direction. The control technology used permits microstructures to be produced precisely and reproducibly utilizing the dynamic properties of the system.