Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Micah Galland0
Terence B. Hook0
Date of Patent
November 2, 2010
0Patent Application Number
109068260
Date Filed
March 8, 2005
0Patent Primary Examiner
Patent abstract
A process is provided for determining the effects of scattering from the edge of a resist during a doping process. Edges of a resist which has been patterned to create an n-well are simulated and individually stepped across a predetermined region in predetermined step sizes. The step sizes may vary from step to step after each step, the scattering effects due to the resist edge at its particular location is determined. A resist of virtually any shape may be divided into its component edges and each edge may be individually stepped during the process.
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