Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rolf Weis0
Christoph Noelscher0
Dirk Manger0
Date of Patent
November 2, 2010
0Patent Application Number
118558090
Date Filed
September 14, 2007
0Patent Primary Examiner
Patent abstract
The invention relates to a method of fabricating an integrated circuit, including the steps of providing at least one layer; performing a first implantation step, wherein particles are implanted into the layer under a first direction of incidence; performing a second implantation step, wherein particles are implanted into the layer under a second direction of incidence which is different from the first direction of incidence; performing a removal step, wherein the layer is partially removed depending on the local implant dose generated by the first and the second implantation step.
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