US Patent 7826064 Interferometer system for monitoring an object
Patent 7826064 was granted and assigned to Zygo Corporation on November, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 11, 2009
0
Date of Patent
November 2, 2010
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Patent Application Number
12635932
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Patent Inventor Names
Peter de Groot
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Carl Zanoni
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Leslie L. Deck
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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