US Patent 7826071 Parametric profiling using optical spectroscopic systems
Patent 7826071 was granted and assigned to KLA-Tencor on November, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 8, 2007
Date of Patent
November 2, 2010
Patent Application Number
11868740
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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