Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lawrence C. Langebrake0
Shinzo Onishi0
Date of Patent
November 9, 2010
0Patent Application Number
116795800
Date Filed
February 27, 2007
0Patent Primary Examiner
Patent abstract
In accordance with the present invention, a novel method to fabricate topological capacitors is provided. The fabrication method of the instant invention is based upon a reversed surface topology utilizing deep reactive ion etching to establish conductive capacitive elements and non-conductive capacitive element groups.
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