Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Scott Collins0
Brian G. Frederick0
Lawrence J. LeGore0
Rosemary Smith0
Date of Patent
November 9, 2010
0Patent Application Number
120824520
Date Filed
April 11, 2008
0Patent Primary Examiner
Patent abstract
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
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