Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Susumu Akamatsu0
Date of Patent
November 9, 2010
Patent Application Number
11545521
Date Filed
October 11, 2006
Patent Primary Examiner
Patent abstract
A trench isolation surrounding the lateral sides of an active region of a P-channel MIS transistor PTr and a trench isolation surrounding the lateral sides of an active region of an N-channel MIS transistor NTr have different film qualities.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
