US Patent 7832416 Imprint lithography apparatus and methods
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Patent abstract
An imprint lithography apparatus including a service station.
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Patent Inventor Names
Shih-Yuan Wang0
Wei Wu0
Zhaoning Yu0
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US Patent 07832416 Imprint lithography apparatus and methods US Patent 7832416 Imprint lithography apparatus and methods
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Patent Number
078324160
Patent Number
78324160
Golden AI
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Official Website
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Patent Jurisdiction
Patent Number
078324160
Date of Patent
November 16, 2010
0Patent Application Number
115399360
Date Filed
October 10, 2006
0Official Website
Patent Primary Examiner
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US Patent 07832416 Imprint lithography apparatus and methods
Infobox
Is a
Patent jurisdiction
Patent number
07832416
Date of patent
November 16, 2010
Patent application number
11539936
Date Filed
October 10, 2006
Patent primary examiner
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