Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shinobu Sugimura0
Akiko Yuzawa0
Masatoshi Sakurai0
Seiji Morita0
Date of Patent
November 16, 2010
0Patent Application Number
124133660
Date Filed
March 27, 2009
0Patent Primary Examiner
Patent abstract
According to one embodiment, an imprinting method includes applying a resist to a substrate, imprinting a stamper on which protruded patterns are formed against the resist applied to the substrate, forcing a distal end of a peeling wedge into a part between the substrate and the stamper, and introducing a gas between the substrate and the stamper to peel off the stamper from the substrate, in which a gap between the substrate and the stamper is made larger than a thickness of the resist at a part into which the distal end of the peeling wedge is forced.
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