Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 16, 2010
Patent Application Number
11986285
Date Filed
November 20, 2007
Patent Primary Examiner
Patent abstract
The present invention relates to a heterocycle-containing onium salt useful as, for example, a cationic photopolymerization initiator and an acid generator for a chemically amplified resist, and provides a heterocycle-containing onium salt shown in the specification.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
