Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sjoerd Nicolaas Lambertus Donders0
Nicolaas Rudolf Kemper0
Nicolaas Ten Kate0
Sergei Shulepov0
Christiaan Alexander Hoogendam0
Date of Patent
November 16, 2010
0Patent Application Number
111675520
Date Filed
June 28, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A gas knife configured to dry a surface in an immersion lithographic apparatus is optimized to remove liquid by ensuring that a pressure gradient is built up in the liquid film on the surface being dried.
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