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US Patent 7835566 All surface data for use in substrate inspection

Patent 7835566 was granted and assigned to Rudolph Technologies, Inc. on November, 2010 by the United States Patent and Trademark Office.

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Patent attributes

Current Assignee
‌
Rudolph Technologies, Inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
78355660
Patent Inventor Names
Randall Shay0
David Reich0
Kenneth Durden0
Date of Patent
November 16, 2010
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Patent Application Number
125558370
Date Filed
September 9, 2009
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Patent Primary Examiner
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Yuzhen Ge
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Patent abstract

A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.

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