US Patent 7838842 Dual mode ion source for ion implantation
Patent 7838842 was granted and assigned to SemEquip on November, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 7, 2005
Date of Patent
November 23, 2010
Patent Application Number
11268005
Patent Inventor Names
Thomas N. Horsky
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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