US Patent 7841820 Universal modular wafer transport system
Patent 7841820 was granted and assigned to Crossing Automation on November, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 9, 2007
Date of Patent
November 30, 2010
Patent Application Number
11938236
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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