US Patent 7842229 Substrate processing apparatus and substrate rotating device
Patent 7842229 was granted and assigned to Tokyo Electron on November, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 27, 2005
Date of Patent
November 30, 2010
Patent Application Number
11666349
Patent Inventor Names
Sumi Tanaka
0
Kouki Suzuki
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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