US Patent 7842931 Extraction electrode manipulator
Patent 7842931 was granted and assigned to Axcelis Technologies on November, 2010 by the United States Patent and Trademark Office.
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Patent abstract
An extraction electrode manipulator system, comprising an ion source, a suppression electrode and a ground electrode, wherein the two electrode are supported by coaxially arranged two water cooled support tubes. A high voltage insulator ring is located on the other end of the coaxial support tube system to act as a mechanical support of the inner tube and also as a high voltage vacuum feedthrough to prevent sputtering and coating of the insulating surface.
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US Patent 07842931 Extraction electrode manipulator US Patent 7842931 Extraction electrode manipulator
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Patent Number
0784293100
Patent Number
784293100
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078429310
Date of Patent
November 30, 2010
0Patent Application Number
122382650
Date Filed
September 25, 2008
0Official Website
Patent Primary Examiner
Edits on 6 Oct, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078429310
Date of Patent
November 30, 2010
0Patent Application Number
122382650
Date Filed
September 25, 2008
0Official Website
Patent Primary Examiner
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US Patent 07842931 Extraction electrode manipulator
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07842931
Date of patent
November 30, 2010
Patent application number
12238265
Date Filed
September 25, 2008
Patent primary examiner
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