US Patent 7843011 Electronic device including insulating layers having different strains
Patent 7843011 was granted and assigned to Freescale Semiconductor on November, 2010 by the United States Patent and Trademark Office.
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An electronic device can include a field isolation region and a first insulating layer having a first strain and having a portion, which from a top view, lies entirely within the field isolation region. The electronic device can also include a second insulating layer having a second strain different from the first strain and including an opening. From a top view, the portion of the first insulating layer can lie within the opening in the second insulating layer. In one embodiment, the field isolation region can include a dummy structure and the portion of the first insulating layer can overlie the dummy structure. A process of forming the electronic device can include forming an island portion of an insulating layer wherein from a top view, the island portion lies entirely within the field isolation region.
US Patent 07843011 Electronic device including insulating layers having different strains US Patent 7843011 Electronic device including insulating layers having different strains
US Patent 07843011 Electronic device including insulating layers having different strains
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