Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 30, 2010
Patent Application Number
12461134
Date Filed
August 3, 2009
Patent Primary Examiner
Patent abstract
The present invention provides a semiconductor device capable of preventing occurrence of cracking and the like, taking a large area, where wiring and the like that function as elemental devices can be arranged, within a plurality of interlayer insulation films, and reducing production cost. The semiconductor device according to the present invention has a low dielectric constant film having a dielectric constant of not less than 2.7. In the low dielectric constant film and the like, materials (e.g., a first dummy pattern, a second dummy pattern) with a larger hardness than that of the low dielectric constant film are formed at a part under a pad part.
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