Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 7, 2010
Patent Application Number
12050244
Date Filed
March 18, 2008
Patent Primary Examiner
Patent abstract
An FTIR measurement is conducted on a background gas to obtain a single beam spectrum SB(BG) [C] and a synthetic single beam spectrum SSB(BG)[D], and an FTIR measurement is conducted on a sample gas to obtain a single beam spectrum SB(Samp)[E] and a synthetic single beam spectrum SSB(Samp)[F]. A double synthetic absorbance spectrum DSAbs of the sample gas as expressed by the following formula (Step T9) is calculated to obtain a concentration of a trace component (impurity) contained in the sample gas:DSAbs =−log[SB(Samp) SSB(BG)/SSB(Samp) SB(BG)]
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