Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takashi Shimizu0
Kazuyuki Mori0
Date of Patent
December 7, 2010
0Patent Application Number
125006650
Date Filed
July 10, 2009
0Patent Primary Examiner
Patent abstract
A micro electro mechanical system device includes a fixed electrode that includes a first electrode group, and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.
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