US Patent 7854820 Upper electrode backing member with particle reducing features
Patent 7854820 was granted and assigned to Lam Research on December, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 15, 2006
Date of Patent
December 21, 2010
Patent Application Number
11639264
Patent Inventor Names
Yen-Kun Wang
0
Rajinder Dhindsa
0
Saurabh J. Ullal
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William M. Denty, Jr.
0
Allan K. Ronne
0
Anthony De La Llera
0
Anthony J. Norell
0
Jaehyun Kim
0
Jason Augustino
0
Keith Comendant
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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