Patent attributes
A micro-mechanical structure system according to the present invention includes: a movable structure 5, at least a portion of the movable structure 5 being formed of a single-crystalline material; an elastic supporting member 10 for supporting the movable structure 5; a stationary electrode section 13, 25 at least partially opposing the movable structure 5; and a base 22 which has a circuit section and to which the stationary electrode 13, 25 is affixed. The stationary electrode section 13, 25 includes a first electrode layer (upper stationary electrode layer) 13 positioned relative to the movable structure 5 and a second electrode layer (lower stationary electrode layer) 25 positioned relative to the base 22, the first electrode layer 13 and the second electrode layer 25 being bonded to each other via adhesion layers 15 and 16.
