US Patent 7857139 Invertible front opening unified pod
Patent 7857139 was granted and assigned to Intel on December, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A front opening unified pod (FOUP) for holding wafers is invertible and compatible with process machines in an inverted orientation. The FOUP can safely transport and store wafers while in a non-upright orientation. The shelves within the FOUP are capable of collapsing and constraining the wafers. Further, a method of holding wafers for processing is provided.
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Patent Inventor Names
Andrew N. Contes0
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Official Website
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US Patent 07857139 Invertible front opening unified pod US Patent 7857139 Invertible front opening unified pod
Infobox
Patent Number
078571390
Patent Number
78571390
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078571390
Date of Patent
December 28, 2010
0Patent Application Number
118603280
Date Filed
September 24, 2007
0Official Website
Patent Primary Examiner
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US Patent 07857139 Invertible front opening unified pod
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07857139
Date of patent
December 28, 2010
Patent application number
11860328
Date Filed
September 24, 2007
Patent primary examiner
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