US Patent 7857683 CMP retaining ring
Patent 7857683 was granted and assigned to Entegris on December, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 28, 2009
Date of Patent
December 28, 2010
Patent Application Number
12568497
Patent Citations Received
Patent Inventor Names
Matthew A. Fuller
0
John Burns
0
Mark V. Smith
0
Martin L. Forbes
0
Jeffery J. King
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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