Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Heinz Kappler0
Date of Patent
January 4, 2011
0Patent Application Number
121381250
Date Filed
June 12, 2008
0Patent Primary Examiner
Patent abstract
The invention relates to a device for treating the surfaces of silicon wafers, comprising transport rollers for transporting the silicon wafer, and at least one conveyor device which wets the surface of the silicon wafer with an aqueous medium on a transport plane which is determined by the transport rollers. The conveyor device is configured such that it can apply the process medium to the surface of the silicon wafer, which is oriented in a downward manner and which is arranged on the transport plane. Several suction pipes for suctioning gaseous or mist-like distributed process mediums from the area surrounding the conveyor device are provided. The suction pipes are arranged in the vertical direction below the transport plane.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
