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US Patent 7862662 Method and material for cleaning a substrate

Patent 7862662 was granted and assigned to Lam Research on January, 2011 by the United States Patent and Trademark Office.

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Patent abstract

Methods for cleaning using a tri-state body are disclosed. A substrate having a particle deposited thereon is provided. A tri-state body that has a solid portion, liquid portion, and a gas portion is generated. A force is applied over the tri-state body to promulgate an interaction between the solid portion and the particle. The tri-state body is removed along with the particle from the surface of the substrate. The interaction between the solid portion and the particle causing the particle to be removed along with the tri-state body.

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